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Deposition behavior of Si on insulating and conducting substrates in the CVD process: approach by charged cluster model Hwang, NM; Cheong, WS; Yoon, Duk Yong, JOURNAL OF CRYSTAL GROWTH, v.206, no.3, pp.177 - 186, 1999-10 |
Observation of nanometer silicon clusters in the hot-filament CVD process Cheong, WS; Hwang, NM; Yoon, Duk Yong, JOURNAL OF CRYSTAL GROWTH, v.204, no.1-2, pp.52 - 61, 1999-07 |
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