Browse by Subject Cu diffusion barrier

Showing results 1 to 3 of 3

1
Large-Area Uniform 1-nm-Level Amorphous Carbon Layers from 3D Conformal Polymer Brushes. A "Next-Generation" Cu Diffusion Barrier?

Kang, Yun-Ho; Lee, Sangbong; Choi, Youngwoo; Seong, Won Kyung; Han, Kyu Hyo; Kim, Jang Hwan; Kim, Hyun-Mi; et al, ADVANCED MATERIALS, v.34, no.15, 2022-04

2
Suppressing channel-shortening effect of self-aligned coplanar Al-doped In-Sn-Zn-O TFTs using Mo-Al alloy source/drain electrode as Cu diffusion barrier

Jeong, Wooseok; Winkler, Joerg; Schmidt, Hennrik; Lee, Kwang-Heum; Park, Sang-Hee Ko, JOURNAL OF ALLOYS AND COMPOUNDS, v.859, 2021-04

3
그래핀 기반의 구리 확산 방지막과 iCVD 고분자를 이용한 도핑 = Graphene based Cu diffusion barrier and feasibility of a novel doping techniquelink

김재환; 조병진; et al, 한국과학기술원, 2017

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