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Browse by Subject indium-aluminum-zinc oxide semiconductor▼ahigh mobility▼ahigh stability▼aoxygen vacancy▼acorrelation between aluminum content and oxide semiconductor

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(A) study on the characteristics of indium-aluminum-zinc oxide thin-film transistors according to aluminum content using plasma-enhanced atomic layer deposition = 플라즈마 원자층 증착법을 이용한 알루미늄 함량에 따른 인듐-알루미늄-아연 산화물 박막 트랜지스터의 특성 연구link

Woo, Namgyu; Park, Sang-Hee Ko; et al, 한국과학기술원, 2023

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