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High-Pressure Deuterium Annealing for Trap Passivation for a 3-D Integrated Structure

Lee, Jung-Woo; Han, Joon-Kyu; Wang, Dong-Hyun; Yun, Seong-Yun; Oh, Jeong-Seob; Bang, Byeong-Chan; Cha, Won-Hyo; et al, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.71, no.4, pp.2801 - 2804, 2024-04

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