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The effect of stress on solid-phase epitaxial regrowth in As+-implanted two-dimensional amorphized Si Shin, YG; Lee, JeongYong; Park, MH; Kang, HK, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.40, no.11, pp.6192 - 6197, 2001-11 |
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