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Showing results 1 to 3 of 3

1
An Acoustic Micromixer Using Low-Powered Voice Coil Actuation

Kim, Noori; Chan, Wei Xuan; Ng, Sum Huan; Yoon, Yong-Jin, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.27, no.2, pp.171 - 178, 2018-04

2
An inductively coupled lamb wave transducer

Greve, David W.; Sohn, Hoon; Yue, C. Patrick; Oppenheim, Irving J., IEEE SENSORS JOURNAL, v.7, no.1-2, pp.295 - 301, 2007

3
TiN/PECVD-Si3N4/TiN diaphragm-based capacitive-type MEMS acoustic sensor

Lee, Jae Woo; Jeon, J. H.; Kim, Y. G.; Lee, S. Q.; Yang, W. S.; Lee, Jungsoo; Lee, Sang-Gug, ELECTRONICS LETTERS, v.52, no.6, pp.468 - 469, 2016-03

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