Browse by Subject Silicon wafer
Showing results 1 to 3 of 3
| Femtosecond laser ultrasonic inspection of a moving object and its application to estimation of silicon wafer coating thickness Yi, Kiyoon; Liu, Peipei; Park, Seong-Hyun; Sohn, Hoon, OPTICS AND LASERS IN ENGINEERING, v.148, 2022-01 |
| Silicon wafer crack detection using nonlinear ultrasonic modulation induced by high repetition rate pulse laser Jang, Jinho; Liu, Peipei; Kim, Byunggi; Kim, Seung-woo; Sohn, Hoon, OPTICS AND LASERS IN ENGINEERING, v.129, 2020-06 |
| 펨토초 레이저를 이용한 실리콘 웨이퍼 표면 미세가공 특성 김재구; 장원석; 조성학; 황경현; 나석주, 한국정밀공학회지, v.22, no.12, pp.184 - 189, 2005-12 |
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