Browse by Subject RF magnetron sputtering technique

Showing results 1 to 3 of 3

1
Effect of a ZnO buffer layer on the properties of Ga-doped ZnO thin films grown on Al2O3 (0001) substrates at a low growth temperature of 250 degrees C

Shin, Seung Wook; Sim, Kyu Ung; Pawar, S. M.; Moholkar, A. V.; Jung, In Ok; Yun, Jae Ho; Moon, Jong-Ha; et al, JOURNAL OF CRYSTAL GROWTH, v.312, no.9, pp.1551 - 1556, 2010-04

2
Effect of Sputtering Powers on Mg and Ga Co-Doped ZnO Thin Films with Transparent Conducting Characteristics

Kim, I.Y.; Shin, Seung Wook; Kim, M.S.; Yun, J.H.; Heo, G.S.; Jeong, C.H.; Moon, J.H.; et al, KOREAN JOURNAL OF MATERIALS RESEARCH, v.23, no.3, pp.155 - 160, 2013

3
RF 마그네트론 스퍼터를 이용하여 제작한 MGZO 박막의 구조적 및 전기적, 광학적 특성에 미치는 스퍼터링 전력의 영향

김진혁; 김인영; 신승욱; 김민성; 윤재호; 허기석; 정채환; et al, 한국재료학회지, v.23, no.3, pp.155 - 160, 2013-03

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