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Suppressing channel-shortening effect of self-aligned coplanar Al-doped In-Sn-Zn-O TFTs using Mo-Al alloy source/drain electrode as Cu diffusion barrier Jeong, Wooseok; Winkler, Joerg; Schmidt, Hennrik; Lee, Kwang-Heum; Park, Sang-Hee Ko, JOURNAL OF ALLOYS AND COMPOUNDS, v.859, 2021-04 |
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