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Split-Frame Gimbaled Two-Dimensional MEMS Scanner for Miniature Dual-Axis Confocal Microendoscopes Fabricated by Front-Side Processing

Jeong, Jae-Woong; Kim, Sunwoo; Solgaard, Olav, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.21, no.2, pp.308 - 315, 2012-04

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