Browse by Subject Cluster tools
Showing results 1 to 3 of 3
| Optimal Scheduling by Workload Analysis for Cluster Tools = 워크로드 분석에 의한 클러스터 장비의 최적 스케쥴링link Kim, Dae-Kyu; 김대규; et al, 한국과학기술원, 2013 |
| Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types Lee, Jun-Ho; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.11, no.2, pp.525 - 536, 2014-04 |
| Scheduling Lot Switching Operations for Cluster Tools Lee, Jun-Ho; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.26, no.4, pp.592 - 601, 2013-11 |
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