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Synthesis of block copolymer containing fluorine random block to control flory-huggins interaction parameter and improving etching selectivity = 플루오린이 랜덤 공중합 된 블록 공중합체의 합성을 통한 Flory-Huggins 상호 인자 향상 및 에칭 선택성 개선 연구link

Song, Seung Won; Jung, Yeon Sik; et al, 한국과학기술원, 2018

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