Browse by Subject Block copolymer▼aself-assembly▼achemo-epitaxy▼aliNe process▼atopography of chemical pattern▼apoly(styrene)▼apoly(methyl methacrylate)▼adefect▼adefect inspection▼adislocation defect▼abridge defect
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| Impact of topography of guide pattern on directed self-assembly process: focusing on defectivity = 화학적 패턴의 구조가 블록공중합체 유도자기조립 공정에 미치는 영향에 대한 연구link Bae, Dajeong; Jung, Yeon Sik; et al, 한국과학기술원, 2019 |
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