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Wet etching characteristics and surface morphology evaluation of MOCVD grown HfO2 film Balasubramanian, M; Bera, LK; Mathew, S; Balasubramanian, N; Lim, V; Joo, MS; Cho, Byung Jin, THIN SOLID FILMS, v.462, no.SI, pp.101 - 105, 2004-09 |
솔-젤 하이브리드 재료의 유기 박막 트랜지스터용 게이트 절연막 및 기체 차단막 응용 = Application of sol-gel hybrid materials to gate dielectrics and barrier layers in organic thin film transistorslink 최천기; Choi, Chaun-Gi; et al, 한국과학기술원, 2008 |
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