Showing results 5 to 11 of 11
Nonlocal electron kinetics in a planar inductive helium discharge Seo, SH; Chung, CW; Hong, JI; Chang, Hong-Young, PHYSICAL REVIEW E, v.62, no.5, pp.7155 - 7167, 2000-11 |
On a dual inductively coupled plasma for direct and remote plasma in a reactor Uhm, S; Lee, KH; Chang, Hong-Young; Chung, CW, PHYSICS OF PLASMAS, v.11, pp.4830 - 4836, 2004-10 |
Parametric study on excitation temperature and electron temperature in low pressure plasmas Park, Hoyong; Choe, Wonho, CURRENT APPLIED PHYSICS, v.10, pp.1456 - 1460, 2010-11 |
Review of heating mechanism in inductively coupled plasma Seo, SH; Chung, CW; Chang, Hong-Young, SURFACE COATINGS TECHNOLOGY, v.131, no.1-3, pp.1 - 11, 2000-09 |
The electron bounce resonance in a low-pressure solenoidal inductive discharge Chung, CW; You, KI; Seo, SH; Kim, SS; Chang, Hong-Young, PHYSICS OF PLASMAS, v.8, no.6, pp.2992 - 2997, 2001-06 |
The finite size effect in a planar inductively coupled plasma Chung, CW; Kim, SS; Seo, SH; Chang, Hong-Young; Yoon, NS, JOURNAL OF APPLIED PHYSICS, v.88, no.2, pp.1181 - 1183, 2000-07 |
The radio frequency magnetic field effect on electron heating in a low frequency inductively coupled plasma Chung, C; Seo, SH; Chang, Hong-Young, PHYSICS OF PLASMAS, v.7, no.9, pp.3584 - 3587, 2000-09 |
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