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Mechanical Properties and Thermal Stability of CrSiN/AlN Multilayer Coatings Using a Closed-Field Unbalanced Magnetron Sputtering System Kim, Sung-Min; Kim, Gwang-Seok; Lee, Sang-Yul; Lee, Jae-Wook; Lee, JeongYong; Lee, Bo-Young, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.54, pp.1109 - 1114, 2009-03 |
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