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Platinum hillocks in Pt/Ti film stacks deposited on thermally oxidized Si substrate Kweon, SY; Choi, Si-Kyung; Yeom, SJ; Roh, JS, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.40, no.10, pp.5850 - 5855, 2001-10 |
$SrBi_2Ta_2O_9$ 강유전체 비 휘발 기억소자에서 Pt/Ti 전극의 hillock 생성 = Hillock formation in Pt/Ti electrode for $SrBi_2Ta_2O_9$ ferroelectric random access memorylink 권순용; Kweon, Soon-Yong; et al, 한국과학기술원, 2002 |
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