Browse by Subject GLOW-DISCHARGE

Showing results 7 to 18 of 18

7
Deposition and 1.54 mu m Er3+ luminescent properties of erbium-doped hydrogenated amorphous silicon thin films by electron cyclotron resonance plasma enhanced chemical vapor deposition of SiH4 with concurrent sputtering of erbium

Shin, JungHoon; Kim, MJ, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.17, no.6, pp.3230 - 3234, 1999

8
Development of a helium flow sensor based on dielectric barrier discharge at atmospheric pressure

Kim, Tae Hoon; Kim, Sung Jin, SENSORS AND ACTUATORS A-PHYSICAL, v.167, pp.297 - 303, 2011-06

9
Effects of silicon-hydrogen bond characteristics on the crystallization of hydrogenated amorphous silicon films prepared by plasma enhanced chemical vapor deposition

hae-yeol kim; jae-beom choi; Lee, Jai-Young, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.17, no.6, pp.3240 - 3245, 1999

10
Electron density and temperature measurement by continuum radiation emitted from weakly ionized atmospheric pressure plasmas

Park, Sang Hoo; Choe, Wonho; Moon, Se Youn; Park, Jaeyoung, APPLIED PHYSICS LETTERS, v.104, no.8, 2014-02

11
Helicon plasma generation at very high radio frequency

Eom, GS; Bae, ID; Cho, Gyuseong; Hwang, YS; Choe, Wonho, PLASMA SOURCES SCIENCE TECHNOLOGY, v.10, no.3, pp.417 - 422, 2001-08

12
Highly conductive boron-doped nanocrystalline silicon-carbide film prepared by low-hydrogen-dilution photo-CVD method using ethylene as a carbon source

Myong, SY; Lee, HK; Yoon, E; Lim, Koeng Su, JOURNAL OF NON-CRYSTALLINE SOLIDS, v.298, no.2-3, pp.131 - 136, 2002-03

13
Nonlocal electron kinetics in a planar inductive helium discharge

Seo, SH; Chung, CW; Hong, JI; Chang, Hong-Young, PHYSICAL REVIEW E, v.62, no.5, pp.7155 - 7167, 2000-11

14
Numerical investigation on plasma and poly-Si etching uniformity control over a large area in a resonant inductively coupled plasma source

S. S. Kim; S. Hamaguchi; N. S. Yoon; Chang, Choong-Seock; Y. D. Lee; S. H. Ku, PHYSICS OF PLASMAS, v.8, no.4, pp.1384 - 1394, 2001-04

15
Oxygen plasma surface treatment of polymer powder in a fluidized bed reactor

Park, SH; Kim, Sang Done, COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, v.133, no.1-2, pp.33 - 39, 1998-02

16
Strong influence of boron doping on nanocrystalline silicon-carbide formation by using photo-CVD technique

Myong, SY; Shevaleevskiy, O; Lim, Koeng Su; Miyajima, S; Konagai, M, JOURNAL OF NON-CRYSTALLINE SOLIDS, v.351, pp.89 - 92, 2005-01

17
Surface treatment of polymeric fine powders by CF4 plasma in a circulating fluidized bed reactor

Jung S.H.; Park S.H.; Kim, Sang Done, JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, v.37, no.2, pp.166 - 173, 2004

18
The influence of hydrogen dilution ratio on the crystallization of hydrogenated amorphous silicon films prepared by plasma-enhanced chemical vapor deposition

Kim, HY; Lee, KY; Lee, Jai Young, THIN SOLID FILMS, v.302, no.1-2, pp.17 - 24, 1997-06

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