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Characterization of particle generated during plasma-enhanced chemical vapor deposition on amorphous carbon layer using particle beam mass spectrometer Kim, Dongbin; Kim, TaeWan; Park, Sang Hyun; Lim, Sung Kyu; Lee, Hyo-Chang; Kim, Taesung; Kang, Sang-Woo, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.36, no.2, 2018-03 |
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