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(A) study on the deposition mechanism and characteristics of $Al_2O_3$ films deposited by atomic layer deposition using TMA and IPA = TMA와 IPA를 이용해 ALD법으로 증착된 $Al_2O_3$ 박막의 증착 기구와 특성에 관한 연구link Yang, Sung; 양성; et al, 한국과학기술원, 2000 |
Organic-inorganic hybrid gate dielectrics for low-voltage pentacene organic thin film transistors Choi, Chaun Gi; Bae, Byeong-Soo, SYNTHETIC METALS, v.159, no.13, pp.1288 - 1291, 2009-07 |
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