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A comparative study on the nucleation and growth of ECR-PECVD PLZT ((Pb,La)(Zr,Ti)O-3) thin films on Pt/SiO2/Si substrates and on Pt/Ti/SiO2/Si substrates Shin, JS; Lee, Won-Jong, THIN SOLID FILMS, v.333, no.1-2, pp.142 - 149, 1998-11 |
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