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Estimation and correction method for the two-dimensional position errors of a planar XY stage based on motion error measurements Hwang, J; Park, CH; Lee, CH; Kim, Seung-Woo, INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, v.46, no.7-8, pp.801 - 810, 2006-06 |
Estimation of 2D position and flatness errors for a planar XY stage based on measured guideway profiles Hwang, Jooho; Park, Chun-Hong; Kim, Seung-Woo, INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.8, no.2, pp.64 - 69, 2007-04 |
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