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Polybenzoxazole/graphene nanocomposite for etching hardmask Shin, Seung Wook; Kim, Jong-Seon; Kim, Seon Joon; Kim, Dae Woo; Jung, Hee-Tae, JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY, v.75, pp.296 - 303, 2019-07 |
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