Nanopatterning of photonic crystals with a photocurable silica-titania organic-inorganic hybrid material by a UV-based nanoimprint technique

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UV patternable high refractive index inorganic-organic hybrid materials prepared by sol-gel process can be nanoimprinted in order to get photonic crystal nanopatterns. Non-hydrolytic sol-gel process can make a UV curable and relatively high refractive index hybrid material, which can be cured without a significant shrinkage for nanoimprinting. Sol-gel process of heterogeneously functionalized silicon alkoxides can make the organically modified inorganic Si-O-Ti network very well. The UV-based nanoimprint technique utilizes transparent templates and UV curable high refractive index materials to allow pattern replication at room temperature and very low pressure. UV-based nanoimprint technique is an efficient way to fabricate this sort of polymeric photonic crystal nanostructures.
Publisher
ROYAL SOC CHEMISTRY
Issue Date
2005-11
Language
English
Article Type
Article
Keywords

WAVE-GUIDES; SPONTANEOUS EMISSION; LITHOGRAPHY; FABRICATION; IMPRINT; NANOSTRUCTURES; SUPERPRISM; DEVICES

Citation

JOURNAL OF MATERIALS CHEMISTRY, v.15, no.42, pp.4535 - 4539

ISSN
0959-9428
DOI
10.1039/b509622g
URI
http://hdl.handle.net/10203/9429
Appears in Collection
MS-Journal Papers(저널논문)
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