RF 마그네트론 스퍼터링 방법으로 SiO2/Si(100)기판위에 성장시킨 ZnO 박막의 구조 및 광특성Structural and optical properties of ZnO thin films grown on SiO2/Si(100) substrates by RF magnetron sputtering
- Publisher
- 한국재료학회
- Issue Date
- 2006-06
- Language
- Korean
- Citation
한국재료학회지, v.16, no.6, pp.360 - 366
- ISSN
- 1225-0562
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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