Deposition and 1.54 mu m Er3+ luminescent properties of erbium-doped hydrogenated amorphous silicon thin films by electron cyclotron resonance plasma enhanced chemical vapor deposition of SiH4 with concurrent sputtering of erbium

Cited 5 time in webofscience Cited 0 time in scopus
  • Hit : 272
  • Download : 0
Erbium-doped hydrogenated amorphous silicon (a-Si:H) thin films were deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition of SiH4 with concurrent sputtering of erbium. The oxygen and carbon contamination levels in all films were 1 X 10(19) and 3 X 10(19) cm(-3), respectively, and the erbium concentrations could be controlled from 0.13 to 1.1 at. % by adjusting the erbium bias voltage. The half width Gamma/2 of the Raman transverse-optic peak of the deposited films ranged from 32+/-1 to 36+/-1 cm(-1), increasing with the increasing Er concentration. Strong 1.54 mu m Er3+ luminescence with little temperature quenching was observed from all samples. The most intense Er3+ luminescence was observed from the as-deposited film with a deposition temperature of 380 degrees C and an erbium concentration of 0.13 at. %, showing that using the present method, erbium-doped a-Si:H films with good erbium optical activity and low structural disorder can be deposited directly while avoiding excessive contamination. (C) 1999 American Vacuum Society. [S0734-2101(99)02706-2].
Publisher
AMER INST PHYSICS
Issue Date
1999
Language
English
Article Type
Article
Keywords

GLOW-DISCHARGE; H FILMS; PHOTOLUMINESCENCE; ELECTROLUMINESCENCE

Citation

JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.17, no.6, pp.3230 - 3234

ISSN
0734-2101
URI
http://hdl.handle.net/10203/75928
Appears in Collection
NT-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 5 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0