ECR 플라즈마를 이용한 실리콘질화 박막 증착 Silicon Nitride Thin Film Deposition Using ECR Plasma

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Publisher
한국표면공학회
Issue Date
1990
Language
Korean
Citation

한국표면공학회지, v.23, no.4, pp.218 - 224

ISSN
1225-8024
URI
http://hdl.handle.net/10203/56542
Appears in Collection
PH-Journal Papers(저널논문)
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