ECR 플라즈마를 이용한 실리콘질화 박막 증착Silicon Nitride Thin Film Deposition Using ECR Plasma
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Sun-Kyu Song | ko |
| dc.contributor.author | Hong-Young Chang | ko |
| dc.date.accessioned | 2013-02-24T10:41:04Z | - |
| dc.date.available | 2013-02-24T10:41:04Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1990 | - |
| dc.identifier.citation | 한국표면공학회지, v.23, no.4, pp.218 - 224 | - |
| dc.identifier.issn | 1225-8024 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/56542 | - |
| dc.language | Korean | - |
| dc.publisher | 한국표면공학회 | - |
| dc.title | ECR 플라즈마를 이용한 실리콘질화 박막 증착 | - |
| dc.title.alternative | Silicon Nitride Thin Film Deposition Using ECR Plasma | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 23 | - |
| dc.citation.issue | 4 | - |
| dc.citation.beginningpage | 218 | - |
| dc.citation.endingpage | 224 | - |
| dc.citation.publicationname | 한국표면공학회지 | - |
| dc.contributor.localauthor | Hong-Young Chang | - |
| dc.contributor.nonIdAuthor | Sun-Kyu Song | - |
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