학위논문(박사) - 한국과학기술원 : 기계공학전공, 2003.8, [ viii, 99 p. ]
박막 두께 측정; 결상 분광기; 분광 결상 타원계측기; 타원계측기; 타원계측법; ellipsometry; thin film thickness measurement; spectrograph; spectral imaging ellipsometer; ellipsometer
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