Green Laser Annealing을 활용한 Monolithic 3D Integration 상부 PMOS 소자 구현과 성능 향상에 대한 연구A Study on the top-tier PMOS fabrication and Performance Improvement of Monolithic 3D Integration Using Green Laser Annealing
- Publisher
- 연세대학교, 한국반도체산업협회, 한국반도체연구조합
- Issue Date
- 2022-01-26
- Language
- Korean
- Citation
제29회 한국반도체학술대회
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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