Effects of Self-Assembled Monolayer and PFPE Lubricant on Wear Characteristics of Flat Silicon Tips

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The effects of self-assembled monolayer (SAM) and perfluoropolyether (PFPE) lubricant on the wear characteristics of flat silicon tips were investigated. The wear test consisted of sliding the silicon tips fabricated on a flat silicon specimen against SAM and PFPE (Z-tetraol) coated silicon (100) wafer. The tips were slid at a low speed for about 15 km under an applied load of 39.2 mu N. The wear volume of the tip was obtained by measuring the tip profile using an Atomic Force Microscope (AFM). It was found that the coatings were effective in reducing the wear of the tips by an order of magnitude from 10(-6) to 10(-7).
Publisher
SPRINGER/PLENUM PUBLISHERS
Issue Date
2009-04
Language
English
Article Type
Article
Keywords

ATOMIC-LAYER DEPOSITION; MEMS APPLICATIONS; MICROELECTROMECHANICAL DEVICES; MICROMECHANICAL STRUCTURES; FAILURE MECHANISMS; FILMS; FRICTION; COATINGS; DEFORMATION; POLYSILICON

Citation

TRIBOLOGY LETTERS, v.34, no.1, pp.61 - 73

ISSN
1023-8883
DOI
10.1007/s11249-008-9386-2
URI
http://hdl.handle.net/10203/220287
Appears in Collection
MS-Journal Papers(저널논문)
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