Reproducibility of the cutoff probe for the measurement of electron density

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Since a plasma processing control based on plasma diagnostics attracted considerable attention in industry, the reproducibility of the diagnostics using in this application has become a great interest. Because the cutoff probe is one of the potential candidates for this application, knowing the reproducibility of the cutoff probe measurement becomes quit important in the cutoff probe application research. To test the reproducibility of the cutoff probe measurement, in this paper, a comparative study among the different cutoff probe measurements was performed. The comparative study revealed remarkable result: the cutoff probe has a great reproducibility for the electron density measurement, i.e., there are little differences among measurements by different probes made by different experimenters. The discussion including the reason for the result was addressed via this paper by using a basic measurement principle of cutoff probe and a comparative experiment with Langmuir probe. Published by AIP Publishing
Publisher
AMER INST PHYSICS
Issue Date
2016-06
Language
English
Article Type
Article
Keywords

INDUCTIVELY-COUPLED PLASMA; LANGMUIR PROBE; HAIRPIN RESONATOR; DISCHARGE

Citation

PHYSICS OF PLASMAS, v.23, no.6

ISSN
1070-664X
DOI
10.1063/1.4947222
URI
http://hdl.handle.net/10203/212400
Appears in Collection
ME-Journal Papers(저널논문)
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