The effects of an alkaline treatment on the ferroelectric properties of poly(vinylidene fluoride trifluoroethylene) [P(VDF-TrFE)] copolymer films are investigated. The alkaline treatment resulted in a small change in the surface roughness but no significant change in the grain shape or size of P(VDF-TrFE) copolymer films, as evidenced by both scanning electron microscopy and atomic force microscopy images. However, x-ray photoelectron spectroscopy results indicated that the alkaline etchant of a KOH solution reacted with P(VDF-TrFE) films to decrease the number of C-F bonds while creating new carbon conjugated double bonds, which decreased the remanent polarization of the P(VDF-TrFE) films. These results can improve our understanding of the degradation mechanism of an alkaline treatment.