Design and fabrication of integrated passive valves and pumps for flexible polymer 3-dimensional microfluidic systems

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This paper describes the fabrication of flexible, polymeric 3-dimensional microfluidic systems with integrated check valves (flap and diaphragm valves) and a pump by stacking patterned poly(dimethylsiloxane) (PDMS) layers containing microchannels and vias. We describe this procedure for fabricating, manipulating, and bonding of PDMS membranes and bas-relief plates into multilayer microfluidic devices. The fabrication and demonstration of integrated check valves and a pump in a prototype polymer 3-dimensional microfluidic system is a step toward practical realization of all-polymer, flexible, low-cost, disposable microfluidic devices for biochemical applications.
Publisher
KLUWER ACADEMIC PUBL
Issue Date
2002-05
Language
English
Article Type
Article
Keywords

CAPILLARY ELECTROPHORESIS CHIPS; CHEMICAL-ANALYSIS SYSTEMS; POLY(DIMETHYLSILOXANE); TECHNOLOGY; ASSAYS; PDMS

Citation

BIOMEDICAL MICRODEVICES, v.4, no.2, pp.117 - 121

ISSN
1387-2176
DOI
10.1023/A:1014683114796
URI
http://hdl.handle.net/10203/13002
Appears in Collection
CH-Journal Papers(저널논문)
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