Growth Mechanism of SOI-GaAs Films on CaF2/Si Structures in the Electron-Beam Exposure and Epitaxy(EBE-epitaxy) Technique
- Issue Date
- 1988
- Language
- ENG
- Citation
Ext. Abst. 20th Conf. on Solid State Devices and Materials, pp.291 - 294
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
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