Nanotransfer Printing with sub-10 nm Resolution Realized using Directed Self-Assembly

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Publisher
WILEY-V C H VERLAG GMBH
Issue Date
2012-07
Language
English
Article Type
Article
Keywords

BLOCK-COPOLYMER; SOFT LITHOGRAPHY; DIBLOCK COPOLYMER; NANOFABRICATION; PATTERNS; ARRAYS; NANOSTRUCTURES; GRAPHOEPITAXY; TEMPLATES; POLYMERS

Citation

ADVANCED MATERIALS, v.24, no.26, pp.3526 - 3531

ISSN
0935-9648
DOI
10.1002/adma.201200356
URI
http://hdl.handle.net/10203/104208
Appears in Collection
MS-Journal Papers(저널논문)
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