Browse by Subject multiple angles of incidence

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An ellipsometric data acquisition method for thin film thickness measurement in real time

Ye, Sang-Heon; Kim, Soohyunresearcher; Kwak, Yoon Keunresearcher; Cho, Hyun Mo; Cho, Yong Jai; Chegal, Won, MEASUREMENT SCIENCE & TECHNOLOGY, v.19, 2008-04

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