Browse by Subject Optical emission spectroscopy

Showing results 1 to 6 of 6

OH 분자 방출 스펙트럼을 이용한 상압 플라즈마의 기체온도 측정

문세연; 최원호researcher, 새물리, v.44, no.6, pp.312 - 317, 2002-06

Parametric study on excitation temperature and electron temperature in low pressure plasmas

Park, Hoyong; Choe, Wonhoresearcher, CURRENT APPLIED PHYSICS, v.10, pp.1456 - 1460, 2010-11

The trend of electron temperature and electron density in the process of microcrystalline silicon solar cells

Lee, Yun-Seong; In, Jung-Hwan; Ahn, Seung-Kyu; Seo, Sang-Hun; Chang, Hong-Youngresearcher; You, Dong-Joo; Ahn, Seh-Won; et al, CURRENT APPLIED PHYSICS, v.10, pp.S234 - S236, 2010-03

Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition

Hur, M.; Lee, J. Y.; Kang, W. S.; Lee, J. O.; Song, Y. -H.; Kim, Sang-Joon; Kim, I. D.researcher, THIN SOLID FILMS, v.619, pp.342 - 346, 2016-11

전자 싸이클로트론 공명 플라즈마 식각장치내에서 $SF_6$ 방전시 생성된 F 활성원자의 분포특성 연구 = Study on the characteristics of F radical atoms created from the $SF_6$ discharge in ECR plasma etcherlink

김용진; Kim, Yong-Jin; et al, 한국과학기술원, 1995

특성 선 스펙트럼 세기비교를 이용한 플라즈마내 전자온도 측정 = Electron temperature determination by line spectrum intensity ratiolink

이효석; Yi, Hyo-Seok; et al, 한국과학기술원, 1999



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