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Showing results 1 to 3 of 3

1
Development of multiple inductively coupled plasma sources using coaxial transmission line for large-area processes

Lee, Jin-Won; An, Sang-Hyuk; Kim, J. H.; Lee, Yun-Seong; Chang, Hong-Young, CURRENT APPLIED PHYSICS, v.16, no.3, pp.415 - 420, 2016-03

2
On the plasma uniformity of multi-electrode CCPs for large-area processing

Jung, Park Gi; Hoon, Seo Sang; Wook, Chung Chin; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.22, no.5, 2013-10

3
Spatially resolved emission using a geometry-dependent system function and its application to excitation temperature profile measurement

Park, Hoyong; Choe, Wonho; Yoo, S. J., SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, v.65, no.12, pp.1029 - 1032, 2010-12

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