High frequency carbon nanomechanical resonators embedded with carbon nanotube stiffening layers

Abstract

We present batch-fabricated carbon-based nanomechanical resonators which are laminated by a pyrolyzed carbon layer and single-walled carbon-nanotube network (C/CNT resonators). The embedded CNT layers simultaneously enhance the electrical conductivity (similar to 160-fold) and mechanical stiffness (10% higher Young's modulus) compared to nonstiffened carbon-only resonators. Dynamic behaviors of the fabricated C/CNT and carbon-only resonators, including fundamental frequency, Q-factor, and frequency tuning characteristics show comparable performance to the silicon based resonators. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3511742]