Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques

Abstract

Spectral phase in a white-light interferogram contains information about the absolute optical path difference (OPD) in the interferometer. Evaluation of spectral phase is therefore important in applications such as profilometry with white light. In spectrally resolved white-light interferometry (SRWLI) the white-light interferogram is spectrally decomposed by a spectrometer in order to determine this phase. Several single-frame techniques in SRWLI have been proposed for the evaluation of the phase including Fourier transform, Hilbert transform, spatial phase shifting, windowed Fourier transform and wavelet transform. In this paper we present a comparative study of these techniques in this application in relation to the temporal phase-shifting technique which is a multi- frame method. Further, we also propose a modified method to remove the influence of source spectrum modulation in Hilbert transform procedure. (C) 2009 Elsevier Ltd. All rights reserved.