Spectrally resolved phase-shifting interference microscopy: technique based on optical coherence tomography for profiling a transparent film on a patterned substrate

Cited 9 time in webofscience Cited 0 time in scopus
  • Hit : 215
  • Download : 0
Spectrally resolved white-light phase-shifting interference microscopy has been used for measurements of the thickness profile of a transparent thin-film layer deposited upon a patterned structure exhibiting steps and discontinuities. We describe a simple technique, using an approach based on spectrally resolved optical coherence tomography, that makes it possible to obtain directly a thickness profile along a line by inverse Fourier transformation of the complex spectral interference function. (C) 2010 Optical Society of America
Publisher
OPTICAL SOC AMER
Issue Date
2010-12
Language
English
Article Type
Article
Keywords

WHITE-LIGHT INTERFEROMETRY; ACOUSTOOPTIC TUNABLE FILTER; STEP-HEIGHT MEASUREMENT; THICKNESS-PROFILE; PROFILOMETRY; INTERFEROGRAMS; RANGE

Citation

APPLIED OPTICS, v.49, no.34, pp.6624 - 6629

ISSN
0003-6935
DOI
10.1364/AO.49.006624
URI
http://hdl.handle.net/10203/96795
Appears in Collection
ME-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 9 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0