Fabrication of Step-Formed PDP Barrier Ribs with High Aspect Ratio by X-Ray Lithography

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X-ray lithography has been used widely for the fabrication of nano/micro structures. This process was applied to the fabrication of barrier ribs with a high aspect ratio for plasma display panel (PDP). The design of X-ray mask and X-ray exposure process were optimized to fabricate highly precise barrier rib pattern for PDP.
Publisher
TAYLOR FRANCIS LTD
Issue Date
2009
Language
English
Article Type
Article
Citation

MOLECULAR CRYSTALS AND LIQUID CRYSTALS, v.514, pp.539 - 548

ISSN
1542-1406
DOI
10.1080/15421400903240829
URI
http://hdl.handle.net/10203/96609
Appears in Collection
ME-Journal Papers(저널논문)
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