표면접촉 인쇄방식을 이용한 극미세 3차원 형상의 이식공정에 관한 연구Contact Print Lithography for Precise Transplantation of Three-dimensional Microstructures into a Microsystem

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Precise fabrication of three-dimensional (3D) self-standing microstructures on thin glass plates via two-photon induced polymerization (TPP) has been an important issue for innovative 3D nanodevices and microdevices. However, there are still issues remaining to be solved, such as building 3D microstructures on opaque materials via TPP and being able to implant them as functional parts onto practical systems. To settle these issues simply and effectively, we propose a contact print lithography (CPL) method using an ultraviolet (UV)-curable polymer layer. We report some of the possibilities and potential of CPL by presenting our results for transplanting 3D microstructures onto large-area substrates and also our examination of some of the effects of the process parameters on successful transplantation.
Publisher
한국정밀공학회
Issue Date
2007-12
Language
Korean
Citation

한국정밀공학회지, v.24, no.12, pp.136 - 142

ISSN
1225-9071
URI
http://hdl.handle.net/10203/93299
Appears in Collection
ME-Journal Papers(저널논문)
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