DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, D.-Y. | ko |
dc.contributor.author | Gweon, Dae-Gab | ko |
dc.date.accessioned | 2013-03-08T06:04:07Z | - |
dc.date.available | 2013-03-08T06:04:07Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006 | - |
dc.identifier.citation | KEY ENGINEERING MATERIALS, v.326-328 I, pp.401 - 404 | - |
dc.identifier.issn | 1013-9826 | - |
dc.identifier.uri | http://hdl.handle.net/10203/92293 | - |
dc.description.abstract | This paper shows a method of designing a nano-positioning planar scanner that can be used in a scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. Furthermore, we used a motion amplifying mechanism in the piezoelectric actuator to achieve a large travel range. We theoretically determined the travel range of the total system and verified the range by using a program based on a finite element analysis. The maximum travel range of the planar scanner was greater than 120 μm. A planar scanner of an atomic force microscope can move samples with a few nm resolutions. To get stable AFM images of small feature samples, a closed loop control could not be used due to large random errors of the sensor. The orthogonality of a new planar scanner having a motion guide is measured and corrected by using a simple electronic circuit in the open loop scanning to reduce the scanner artifact. | - |
dc.language | English | - |
dc.publisher | Trans Tech Publications | - |
dc.title | Design and orthogonality correction of a planar scanner for an atomic force microscope | - |
dc.type | Article | - |
dc.identifier.scopusid | 2-s2.0-33751549560 | - |
dc.type.rims | ART | - |
dc.citation.volume | 326-328 I | - |
dc.citation.beginningpage | 401 | - |
dc.citation.endingpage | 404 | - |
dc.citation.publicationname | KEY ENGINEERING MATERIALS | - |
dc.contributor.localauthor | Gweon, Dae-Gab | - |
dc.contributor.nonIdAuthor | Lee, D.-Y. | - |
dc.subject.keywordAuthor | Flexure guide | - |
dc.subject.keywordAuthor | Nano-positioning planar scanner | - |
dc.subject.keywordAuthor | Scanning probe microscope | - |
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