DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jeon, JW | ko |
dc.contributor.author | Yoon, Jun-Bo | ko |
dc.contributor.author | Lim, Koeng Su | ko |
dc.date.accessioned | 2013-03-08T01:39:54Z | - |
dc.date.available | 2013-03-08T01:39:54Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2007-09 | - |
dc.identifier.citation | SENSORS AND ACTUATORS A-PHYSICAL, v.139, no.1-2, pp.281 - 286 | - |
dc.identifier.issn | 0924-4247 | - |
dc.identifier.uri | http://hdl.handle.net/10203/91745 | - |
dc.description.abstract | This paper describes a simple and effective method to fabricate various shapes and profiles of three-dimensional (3-D) silicon microstructures using a shape-controllable 3-D lithography along with dry plasma etching. The first step is to fabricate 3-D photoresist patterns with various slopes and round profiles on a silicon substrate by the shape-controllable 3-D lithography using polymer dispersed liquid crystal (PDLC) films, which is compatible to conventional lithography process. The second step is to transfer the sloping photoresist patterns into the silicon by etching 3-D photoresist molds and the silicon surface through inductively coupled plasma (ICP) process successively. The proposed microfabrication method for 3-D silicon microstructures can be widely applied for silicon lens arrays and silicon solar cells. (c) 2006 Elsevier B.V. All rights reserved. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE SA | - |
dc.subject | FABRICATION | - |
dc.subject | TECHNOLOGY | - |
dc.title | Sloping profile and pattern transfer to silicon by shape-controllable 3-D lithography and ICP | - |
dc.type | Article | - |
dc.identifier.wosid | 000249678000043 | - |
dc.identifier.scopusid | 2-s2.0-34548177340 | - |
dc.type.rims | ART | - |
dc.citation.volume | 139 | - |
dc.citation.issue | 1-2 | - |
dc.citation.beginningpage | 281 | - |
dc.citation.endingpage | 286 | - |
dc.citation.publicationname | SENSORS AND ACTUATORS A-PHYSICAL | - |
dc.contributor.localauthor | Yoon, Jun-Bo | - |
dc.contributor.localauthor | Lim, Koeng Su | - |
dc.contributor.nonIdAuthor | Jeon, JW | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | 3-D silicon microstructure | - |
dc.subject.keywordAuthor | 3-D lithography | - |
dc.subject.keywordAuthor | pattern transfer | - |
dc.subject.keywordAuthor | polymer dispersed liquid crystal (PDLC) | - |
dc.subject.keywordAuthor | inductively coupled plasma (ICP) | - |
dc.subject.keywordPlus | FABRICATION | - |
dc.subject.keywordPlus | TECHNOLOGY | - |
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