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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Journal Papers(저널논문)

An ellipsometric data acquisition method for thin film thickness measurement in real time

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dc.contributor.authorYe, Sang-Heonko
dc.contributor.authorKim, Soohyunko
dc.contributor.authorKwak, Yoon Keunko
dc.contributor.authorCho, Hyun Moko
dc.contributor.authorCho, Yong Jaiko
dc.contributor.authorChegal, Wonko
dc.date.accessioned2013-03-06T12:21:28Z-
dc.date.available2013-03-06T12:21:28Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2008-04-
dc.identifier.citationMEASUREMENT SCIENCE & TECHNOLOGY, v.19-
dc.identifier.issn0957-0233-
dc.identifier.urihttp://hdl.handle.net/10203/86969-
dc.description.abstractA novel ellipsometric data acquisition method is introduced to measure the optical properties of a sample in real time. The experimental setup utilized a focused-beam ellipsometer integrated high numerical aperture objective lens in the normal direction to the sample surface. It is able to achieve ellipsometic data at multiple angles of incidence within a sub-mu m region of sample. Also a calibration technique is described. The experimental results for various SiO(2.) thin film samples are demonstrated.-
dc.languageEnglish-
dc.publisherIOP PUBLISHING LTD-
dc.subjectIMAGING ELLIPSOMETRY-
dc.subjectMICROSCOPY-
dc.titleAn ellipsometric data acquisition method for thin film thickness measurement in real time-
dc.typeArticle-
dc.identifier.wosid000254406700046-
dc.identifier.scopusid2-s2.0-42549092981-
dc.type.rimsART-
dc.citation.volume19-
dc.citation.publicationnameMEASUREMENT SCIENCE & TECHNOLOGY-
dc.identifier.doi10.1088/0957-0233/19/4/047002-
dc.contributor.localauthorKim, Soohyun-
dc.contributor.localauthorKwak, Yoon Keun-
dc.contributor.nonIdAuthorCho, Hyun Mo-
dc.contributor.nonIdAuthorCho, Yong Jai-
dc.contributor.nonIdAuthorChegal, Won-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorfocused-beam ellipsometer-
dc.subject.keywordAuthorreal-time measurement-
dc.subject.keywordAuthormultiple angles of incidence-
dc.subject.keywordAuthorthin film metrology-
dc.subject.keywordPlusIMAGING ELLIPSOMETRY-
dc.subject.keywordPlusMICROSCOPY-
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ME-Journal Papers(저널논문)
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