A novel patterning method of low-resistivity metals
Photocatalytic layers of amorphous TiO2 and polyvinyl alcohol were used for the patterning of low-resistivity metals such as copper and silver without using high cost materials and equipment.
- Publisher
- CHEMICAL SOC JAPAN
- Issue Date
- 2005-01
- Language
- English
- Article Type
- Article
- Keywords
THIN-FILM; COPPER
- Citation
CHEMISTRY LETTERS, v.34, no.1, pp.82 - 83
- ISSN
- 0366-7022
- Appears in Collection
- CH-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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