2-종모드 레이저를 이용한 고분해능 헤테로다인 간섭계A High-Resolution Heterodyne Interferometer using Beat Frequency between Two-Axial Modes of a HeNe Laser

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 498
  • Download : 0
We propose a new scheme of high-resolution heterodyne interferometer that employs the two-axial mode He-Ne laser with an inter-mode beat frequency of 600~1000 MHz. An electronic RF-heterodyne circuit lowers the beat frequency down to 5 MHz, so that the phase change of the interferometer output is precisely measured with a displacement resolution of 0.1 nanometer without significant loss of dynamic bandwidth. A thermal control scheme is adopted to stabilize the cavity length with ainus to suppress frequency drifts caused by the phenomena of frequency pulling and polarization anisotropy of the two-axial made laser to a stability level of 2 parts in 109. The two-axial mode HeNe laser yields a high output power of 2.0 mW, which allows us to perform multiple measurements of up to 10 machine axes simultaneously.
Publisher
한국정밀공학회
Issue Date
2002-04
Language
Korean
Citation

한국정밀공학회지, v.19, no.4, pp.195 - 201

ISSN
1225-9071
URI
http://hdl.handle.net/10203/84965
Appears in Collection
ME-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0