DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, MC | ko |
dc.contributor.author | Kim, Seung-Woo | ko |
dc.date.accessioned | 2013-03-04T03:27:37Z | - |
dc.date.available | 2013-03-04T03:27:37Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2001-04 | - |
dc.identifier.citation | OPTICS LETTERS, v.26, no.7, pp.420 - 422 | - |
dc.identifier.issn | 0146-9592 | - |
dc.identifier.uri | http://hdl.handle.net/10203/81728 | - |
dc.description.abstract | We present a method for compensating for the phase change on reflection in scanning white-light inteferometry that practically permits precise three-dimensional profile mapping of composite target surfaces that comprise multiple, dissimilar materials. The compensation method estimates the variation of phase change with the spectral distribution of the light source through a first-order approximation and then directly compensates for the measurement errors by performing two additional quasi-monochromatic phase-measuring interferometric measurements. Experimental results prove that the proposed compensation method is capable of reducing the measurement error in step height gauging to +/-5 nm or less. (C) 2001 Optical Society of America. | - |
dc.language | English | - |
dc.publisher | OPTICAL SOC AMER | - |
dc.subject | INTERFEROGRAMS | - |
dc.subject | INTERFERENCE | - |
dc.subject | PROFILOMETRY | - |
dc.title | Compensation of phase change on reflection in white-light interferometry for step height measurement | - |
dc.type | Article | - |
dc.identifier.wosid | 000167774200008 | - |
dc.identifier.scopusid | 2-s2.0-0000726401 | - |
dc.type.rims | ART | - |
dc.citation.volume | 26 | - |
dc.citation.issue | 7 | - |
dc.citation.beginningpage | 420 | - |
dc.citation.endingpage | 422 | - |
dc.citation.publicationname | OPTICS LETTERS | - |
dc.contributor.localauthor | Kim, Seung-Woo | - |
dc.contributor.nonIdAuthor | Park, MC | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | INTERFEROGRAMS | - |
dc.subject.keywordPlus | INTERFERENCE | - |
dc.subject.keywordPlus | PROFILOMETRY | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.