Compensation of phase change on reflection in white-light interferometry for step height measurement

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dc.contributor.authorPark, MCko
dc.contributor.authorKim, Seung-Wooko
dc.date.accessioned2013-03-04T03:27:37Z-
dc.date.available2013-03-04T03:27:37Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2001-04-
dc.identifier.citationOPTICS LETTERS, v.26, no.7, pp.420 - 422-
dc.identifier.issn0146-9592-
dc.identifier.urihttp://hdl.handle.net/10203/81728-
dc.description.abstractWe present a method for compensating for the phase change on reflection in scanning white-light inteferometry that practically permits precise three-dimensional profile mapping of composite target surfaces that comprise multiple, dissimilar materials. The compensation method estimates the variation of phase change with the spectral distribution of the light source through a first-order approximation and then directly compensates for the measurement errors by performing two additional quasi-monochromatic phase-measuring interferometric measurements. Experimental results prove that the proposed compensation method is capable of reducing the measurement error in step height gauging to +/-5 nm or less. (C) 2001 Optical Society of America.-
dc.languageEnglish-
dc.publisherOPTICAL SOC AMER-
dc.subjectINTERFEROGRAMS-
dc.subjectINTERFERENCE-
dc.subjectPROFILOMETRY-
dc.titleCompensation of phase change on reflection in white-light interferometry for step height measurement-
dc.typeArticle-
dc.identifier.wosid000167774200008-
dc.identifier.scopusid2-s2.0-0000726401-
dc.type.rimsART-
dc.citation.volume26-
dc.citation.issue7-
dc.citation.beginningpage420-
dc.citation.endingpage422-
dc.citation.publicationnameOPTICS LETTERS-
dc.contributor.localauthorKim, Seung-Woo-
dc.contributor.nonIdAuthorPark, MC-
dc.type.journalArticleArticle-
dc.subject.keywordPlusINTERFEROGRAMS-
dc.subject.keywordPlusINTERFERENCE-
dc.subject.keywordPlusPROFILOMETRY-
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